|
| 13@Semiconductors
A (Silicon) |
||||||||
Sept. 2 (Tue.) |
Sept. 3 (Wed.) |
Sept. 4 (Thu.) |
Sept. 5 (Fri.) |
|||||
| AM |
PM |
AM |
PM |
AM |
PM |
AM |
PM |
|
| 13.1 Fundamental Materials Characterization and Evaluation | 9-G@9:15`12:00 | 9-G@13:00`17:00 | 9-G@9:15`12:00 | |||||
| 13.2 Surface | 21-CD@13:30`17:00 | 21-CD@9:30`12:00 | 21-CD@13:30`16:45 | |||||
| 13.3 Gate Insulator Technology | 30-Y@9:15`12:00 | 21-CB@9:30`12:30 | 21-CB@13:30`17:45 | 21-CB@9:15`12:30 | 21-CB@13:30`17:45 | |||
| 13.4 Interconnect Technology | 21-CD@9:30`12:30 | 21-CD@13:30`18:30 | ||||||
| 13.5 Si Process Technology | 22-CH@9:00`11:45 | 22-CH@12:45`18:15 | 22-CH@9:30`12:30 | 22-CH@13:30`18:30 | 22-CH@9:00`11:30 | |||
| 13.6 Si Devices/Integration Technology | 9-E@9:00`12:00 | 9-E@13:00`17:00 | 9-E@9:00`12:00 | 9-E@9:00`12:00 | 9-E@13:00`17:00 | 9-E@9:00`11:00 | ||
| 13.7 Simulation | Μη-P11iPoster session onlyj@15:30`17:30 | |||||||