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| 7 Beam
Technologies |
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| Mar. 22 (Wed.) |
Mar. 23 (Thu.) |
Mar. 24 (Fri.) |
Mar. 25 (Sat.) |
Mar. 26 (Sun.) |
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| AM |
PM |
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PM |
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PM |
AM |
PM |
AM |
PM |
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| 7.1 X-ray Technologies | 8-E 9:30～12:45 | 8-E 13:45～18:00 | 3-ZQ 9:00～11:30 | |||||||
| 7.2 Electron Microscopy and Diagnostics | 5-ZL (poster with short presentation) 9:00～11:50 | |||||||||
| 7.3 Lithography | 7-ZB 9:30～12:30 | 7-ZB 13:30～18:00 | 7-ZB 9:30～12:30 | |||||||
| 7.4 Nanoimprint | 8-F 14:00～18:15 | |||||||||
| 7.5 Beam Excitation Surface Reaction | 8-F 10:00～12:15 | 8-F 13:15～16:15 | ||||||||
| 7.6 Ion Beam Technology | 8-F 10:00～13:00 | 8-F 14:00～18:45 | 8-F 10:00～13:00 | |||||||
| 7.7 Micro-Field Emitter | 8-F 9:00～12:00 | 8-F 13:00～19:00 | ||||||||
| 7.8 Beam Application and New Technology | 8-F 10:00～12:15 | 8-F 13:15～14:45 | ||||||||