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| 14
Amorphous and Microcrystalline Materials |
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| Mar. 22 (Wed.) |
Mar. 23 (Thu.) |
Mar. 24 (Fri.) |
Mar. 25 (Sat.) |
Mar. 26 (Sun.) |
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| 14 Invited Lectures: Recent developments in plasma-enhanced CVD apparatuses for TFT fabrication | 7-Y 13:30～14:30 | |||||||||
| 14.1 Fundamental Properties and Evaluations | 7-ZA 9:30～12:15 | 7-ZA 9:15～12:30 | 7-ZA 13:30～18:00 | |||||||
| 14.2 Process Technologies | 7-Y 9:00～12:15 | 7-Y 14:30～16:30 | ||||||||
| 14.3 Devices | 7-Y 16:30～18:30 | |||||||||