Novel synthesis methods for dielectric oxynitrides
Novel synthesis methods for perovskite-type oxynitrides without the use of gaseous ammonia are reported in this review. The direct synthesis of SrTaO2N was performed from a mixture of SrCO3 and Ta3N5 below 1000°C under flowing nitrogen. The oxynitride was also obtained from an SrTaO3.5 precursor oxide using C3N4 as both the reduction and nitridation source at 800°C, which is 200°C lower than that required for ammonia nitridation reaction.
- 1 Division of Applied Chemistry, Faculty of Engineering, Hokkaido University