High-density and long-scale plasma by atmospheric pressure microwave discharge
Hirotaka TOYODA1, Haruka SUZUKI1
A long-scale atmospheric pressure microwave plasma up to 〜1m in length is produced using a traveling wave. Microwave power flow is controlled by a loop-structured waveguide, a microwave circulator and a tuner. From optical measurement of the N2 emission profile and Hβ Stark broadening with a small N2 or H2 addition, a very low gas temperature of 400K and a high electron density of 〜1020m-3 were confirmed. In contrast to other conventional APPs using pulsed power to suppress the gas heating and resulting arc discharge, the AP- MLP utilizes CW microwave power. Very fast wettability control is demonstrated.
- 1 Department of Electronics, Nagoya University