Liquid-silicon processed polycrystalline silicon thin-film transistors on paper
Ryoichi ISHIHARA1,2, Miki TRIFUNOVIC1, Paolo M. SBERNA1, Tatsuya SHIMODA2
Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with a doctor-blade coating and local irradiation of an excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on paper. This technique will be a breakthrough for printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.
- 1 Delft University of Technology, EEMCS, Q&CE, QuTech
- 2 School of Materials Science, Japan Advanced Institute of Science and Technology