Uncooled infrared focal plane arrays
An uncooled infrared focal plane array (IRFPA), which is a tool for night vision and thermography, is an integrated MEMS device with thermal infrared detectors. The MEMS technology has been contributing to uncooled IRFPA development by enabling structures that have high thermal insulation. Although various MEMS-based uncooled IRFPAs have been proposed in the past, only two have continued to prosper: resistance bolometers and SOI diode uncooled IRFPAs. The pixel pitch was reduced to 12µm, and the spatial resolution was increased to a level compatible with HDTV. In this paper, we look back at the development of uncooled IRFPAs from the pre-MEMS era, consider the role of MEMS technology in development, and discuss the prospects for uncooled IRFPAs.
- 1 Ritsumeikan University