Development of a new MEMS technology using a potassium ion electret technique
Gen HASHIGUCHI1, Tatsuhiko SUGIYAMA1, Hiroshi TOSHIYOSHI2
A new electret technique named the potassium ion electret is introduced. Potassium ions are incorporated into an oxide film during a thermal oxidation process and then taken out from the oxide by applying a DC voltage at a high temperature. As a result, we have now demonstrated the remaining oxygen deficiencies are negatively charged and give an electret voltage up to 400V. A vibration energy harvesting device fabricated by using this electret technique is presented, as well as a charging experiment driven by an actual acceleration obtained on a highway. Other devices that have a new function due to this electret technique are also touched upon briefly.
- 1 Department of Mechanical Engineering, Faculty of Engineering, Shizuoka University
- 2 Research Center for Advanced Science and Technology, The University of Tokyo