OYO BUTURI
Vol.87
No.4
2018
4
20184874282
OYO BUTURI Vol.87 No.4 (2018)
Our Research

Photomechanical response of amorphous carbon nitride thin films

Masami AONO1

Amorphous carbon nitride, a-CNx, thin films are well known as a hard coating material with a low friction coefficient. But, there are still many findings concerning the electrical and optical properties of a-CNx films, which are characterized by a wide variety of structures depending on the deposition techniques and conditions. In this study, we introduce one of the unique properties, a photoinduced deformation of a-CNx film deposited by reactive radio frequency magnetron sputtering using a graphite target and pure nitrogen gas.

  • 1 Department of Materials Science and Engineering, National Defense Academy
OYO BUTURI Vol.87 No.4 p.282 (2018)