| Tanemasa Asano(Professor, Faculty of Information Science and Electrical Engineering, Kyushu University) | For Contributions to Growth of Crystalline Silicon Films and Thin-Film Transistor Technology |
| Sukekatsu Ushioda(President, National Institute for Materials Science) | Spectroscopic Studies of Solid Surfaces |
| Katsuyuki Utaka(Professor, Faculty of Science and Engineering, Waseda University) | Research on Single-Wavelength Semiconductor Laser Diodes and Low-Power Consumption Optical Switches for Optical Networks |
| Tetsuo Endoh(Professor, Graduate School of Engineering, Tohoku University) | Development of Nonvolatile Memories and Pioneering Researches on Three-Dimensional Structured Memories and Logics |
| Tetsuyuki Kurata(General Manager, LCD Division, Mitsubishi Electric Corporation) | Research & Development about Characteristics and Its Application of both Organic Materials and Liquid Crystals |
| Akihiro Kono(Professor Emeritus, Nagoya University) | Pioneering Study of Laser Diagnostics and of Fundamental Processes in Low-Temperature Plasmas |
| Tetsushi Sakai(Professor Emeritus, Tokyo Institute of Technology) | Research and Development of SST Technology for High Speed Silicon Bipolar Integrated Circuits |
| Masato Shibuya(Professor, Faculty of Engineering, Tokyo Polytechnic University) | Invention of the Phase-Shifting Mask and Contributions to the Resolution Enhancement of Optics for Semiconductor Exposure Apparatus |
| Yoshiyuki Suda(Professor, Institute of Engineering, Tokyo University of Agriculture and Technology) | Development of Group IV Semiconductor Nanostructure Control Processes and Nanodevices |
| Shuichi Tahara(Vice President, Central Research Laboratories, NEC) | Research for Superconducting and Magnetic Electronics with Tunnel Junctions |
| Toshiaki Tsuchiya(Professor, Interdisciplinary Graduate School of Science and Engineering, Shimane University) | Pioneering Research on the Reliability Physics in Scaled Silicon-CMOS Devices |
| Kazuo Nakajima(Endowed Chair Professor, Graduate School of Energy Science, Kyoto University) | Research and Development for Growth of High-Quality Semiconductor Crystals for Optical Devices |
| Tadashi Nishimura(Visiting Professor, Graduate School of Science and Engineering, Tokyo Institute of Technology) | Research and Application Study of a Single Cristal- and a PolyCristalline Silicon Layer on an Insulating Film for the Large Scale Integrated Circuit |
| Michio Niwano(Professor, Research Institute of Electrical Communication, Tohoku University) | Research on In-Situ Observation of Semiconductor Surfaces by Infrared Spectroscopy and Its Applications |
| Rikizo Hatakeyama(Professor Emeritus, Tohoku University) | Researches on New Functionalization of Nanocarbons by Plasma Processing |
| Kazuhiro Hane(Professor, Graduate School of Engineering, Tohoku University) | Study of Micro-Electro-Mechanical Systems for Optical Applications |
| Shinji Hayashi(Professor, Graduate School of Engineering, Kobe University) | Pioneering Work on Optical Properties of Nanocrystals and Surface Plasmons |
| Keigo Hoshikawa(Visiting Professor, Faculty of Engineering, Shinshu University) | Research and Development of Growth Technologies of Semiconductor and Oxide Bulk Crystals |
| Masaru Hori(Professor, Department of Electrical Engineering and Computer Science, Nagoya University) | Studies of Radical-Controlled Plasma Process |
| Kenjiro Miyano(Professor Emeritus, The University of Tokyo) | Demonstration, Detection, and Elucidation of Novel Nano-Optical Phenomena |
| Hiro Munekata(Professor, Imaging Science and Engineering Laboratory, Tokyo Institute of Technology) | Creation of a III-V-Based Magnetic Semiconductor, Incorporating the Study of Its Optical Functionality |
| Masafumi Yamamoto(Professor, Graduate School of Information Science and Technology, Hokkaido University) | Pioneering Work on Device Applications of Tunneling Phenomena |
| Takahiro Wada(Professor, Faculty of Science and Technology, Ryukoku University) | R&D of CuInSe2-Based Photovoltaic Materials and Their Thin Film Fabrication Processes |
