Symposium
New developments in advanced technology for image information processing and display
August 29 (Tue.) 13:00〜17:35
29p-ZM- / 0
  1 Advanced visual interface photonics Osaka City Univ. 1 Miyazaki Daisuke 1
  2 High Fidelity Generation and Interactive Visualization of 3D Video Kyoto Univ. 1 Matsuyama Takashi 1
  3 Interactive Holographic Television Nihon Univ. 1 *Hiroshi Yoshikawa 1
  4 Reproduction of 3-dimensional image and field - Various problems should be solved CASI Osaka Univ. 1, Graduate School of Eng. Sci. Osaka University 2 *Tetsuro Kobayashi 1, Shintaro Hisatake 2
    Break 15:20〜15:35
  5 Anisotropic Optical Reflectance Reproduction Technology and Applications. digital fashion ltd. Sakaguchi Yoshiyuki
  6  Information accessibility based on characteristics of human vision Ritsumeikan University Hiroyuki Shinoda
  7 Securing displayed images on liquid-crystal display by use of visual cryptography Univ. of Tokushima *Yamamoto Hirotsugu 1
  8 Secure Image Information Processing by Use of Digital Holography Wakayama Univ. 1 Nomura Takanori 1
Recent progress in surface analysis technique
August 29 (Tue.) 13:00〜17:20
29p-ZV- / 0
  1 Introduction Fac.Eng., Kobe Univ. 1, Fac.Eng., Kyoto Univ. 2 Urano Toshio 1, Kimura Kenji 2
  2 Ultrahigh-resolution photoemission spectroscopy: fine electronic structure and quasiparticles. Tohoku Univ. 1 *Takafumi Sato 1, Takashi Takahashi 1
  3 Two-Photon Photoemission Microspectroscopy Osaka Univ. 1, CREST 2 *Munakata Toshiaki 1,2
  4 Probing nanoscale dynamics using laser-combined scanning tunneling microscopy Inst. of Appl. Phys., Univ. of Tsukuba Hidemi Shigekawa
    Break 15:05〜15:20
  5 Atomic level characterization of carbon nanostructures AIST 1, JST 2 Suenaga Kazu
  6 Spin polarization spectroscopy using metastable atom beam; observation of top-surface-magnetism and its imaging Nat. Inst. Materials Sci. 1, PRESTO-JST 2 *Yamauchi Yasushi 1, Kurahashi Mitsunori 1, Suzuki Taku 1,2,
  7 Hydrogen microscope with a nuclear reaction- probing 3D distribution and quantum state in solids Inst. Ind. Sci., Univ. Tokyo *Fukutani Katsuyuki 1
X線・中性子による quick 反射率法の展望−表面や埋もれたナノ構造の変化を追う(II)
August 29 (Tue.) 9:30〜17:30
29a-ZL- / 0
  1 Introductory Talk: New opportunities in quick reflectometry with X-rays and neutrons Nat'l Inst. for Mater. Sci. 1 *Sakurai Kenji 1
  2 Real time observation of thermal oxidation of ultrathin silicon-on-insulator wafers NTT Basic Research Labs. 1 Omi Hiroo 1, Kawamura Tomoaki 1
    Break 10:30〜10:50
  3 X-ray study of temporal evolution of semiconductor nanostructures during growth JAEA 1 *Takahasi Masamitu 1, Kaizu Toshiyuki 1
  4 In-situ measurement of crystallization process of polyimide thin films by GIXD Analysis and Simulation Center, Asahi-KASEI Corporation 1, Marketing Center,FPC/FPD Materials, Asahi-KASEI Corporation 2 Matsuno Shin-ya 1, Kikuma Jun 1, Asano Gouji 2, Nayuki Takeshi 1
    Lunch 12:10〜13:30
29p-ZL- / 0
  1 XR for liquid-gas interfaces Ritsumeikan Univ. Yohko F. Yano
  2 Development of liquid interface spectrometer at SPring-8 JASRI 1,Kyushu Univ. 2,Fukuoka Women's Univ. 3,Utsunomiya Univ. 4  *Uruga Tomoya 1,Tanida Hajime 1,Takiue Takanori 2,Ikeda Norihiro 3,Iimura Kenichi 4,Hirosawa Ichiro 1
    Break 14:50〜15:10
  3 Potential use of plastically deformed semiconducting wafers as optical elements for quick reflectivity measurements Kyoto Univ. 1, Tohoku Univ. 2 *OKUDA Hiroshi 1, Nakajima Kazuo 2, Fujiwara Kozo 2, Ochiai Shojiro 1, Usami Noritaka 2
  4 Buried hetero-interface of H, D monolayer JAEA 1, Eiko 2, KEK 3 *Asaoka Hidehito 1, Takeda Masayasu 1, Soyama Kazuhiko 1, Shamoto Shin-ichi 1, Yamazaki Tatuya 1,2, Torikai Naoya 3
  5 A new neutron reflectometer SUIREN at JRR-3 JAEA 1 *Yamazaki Dai 1, Soyama Kazuhiko 1, Toru Ebisawa 1, Maruyama Ryuji 1, Takeda Masayasu 1
  6 Summary and Discussion  
Recent Progress of Carbon Nanotube Research
August 29 (Tue.) 9:50〜16:30
29a-A- / 0
  1 Recent Advances of Carbon Nanotube Research ISIR Kazuhiko Matsumoto
  2  Recent Progress of Carbon Nanotube CVD Growth Tokyo Univ. Shigeo Maruyama
  3 Doping Control of Carbon Nanotubes by Plasma Processing Department of Electronic Engineering, Tohoku Univ. 1 *R. Hatakeyama 1, T. Kaneko 1, W. Oohara 1
  4 Aligned growth and characterization of single-walled carbon nanotubes on crystalline surfaces Kyushu Univ. 1 *Hiroki Ago 1
  5 HRTEM characterization of carbon nanotubes AIST 1, JST 2 Suenaga Kazu
    Lunch 12:00〜13:00
29p-A- / 0
  1 In Situ Measurements for Tracking Carbon Nanotube Growth Tokyo Univ. of Science 1, NTT Labs. 2, CREST/JST 3 *Homma Yoshikazu 1,3, Takagi Daisuke 1 and Kobayashi Yoshihiro 2,3
  2 Electrical properties of carbon nanotubes studied by AFM Kyoto Univ. 1 Yamada Hirofumi 1
  3 Characterization of Transport Propertties in Carbon Nanotube FETs Using Micro-PL Spectroscopy Graduate School of Eng., Nagoya Univ.1, Inst. Adv. Res., Nagoya Univ.2, PRESTO/JST3 *Takashi Mizutani1,2, Yutaka Ohno1,3
    Break 14:30〜15:00
  4 Carbon Nanotube Devices and its Bio-Sensor Applications ISIR Kazuhiko Matsumoto
  5 Quantum Nanodevices with Carbon Nanotubes RIKEN 1, CREST-JST 2, TIT 3 *Koji Ishibashi1,2, Satoshi Moriyama1, Tomoko Fuse1,3, Masaki Suzuki1,3, Yukio Kawano1, Tomohiro Yamaguchi1
  6 Toward the development of nanoelectromechanical devices consisting of carbon nanotubes Osaka Prefecture Univ. 1, Handai FRC 2 *Nakayama Yoshikazu 1,2
Novel Development of Laser Processing Toward Bioscience
August 29 (Tue.) 13:00〜17:15
29p-L- / 0
  1 Novel Development of Laser Processing Toward Bioscience Hokkaido Univ. Tsuboi Yasuyuki 1
  2 Development of sensing device using nano-structured surface AIST 1, Univ. of Hyogo 2, NTT-MI Labs. 3, Keio Univ. 4, NTT Afty 5, JST-Crest 6 Niwa Osamu 1,6 , Kurita Ryoji 1, Sato Yukari 1, Mizutani Fumio 2, Iwasaki Yuzuru 3, Suzuki Koji 4, 6, Hirono Shigeru 5
  3 Micro biochip fabrication using ultrashort wavelength and pulsed laser and its applications RIKEN *Hanada Yasutaka 1, Sugioka Koji 1, Obata Kotaro 1, Midorikawa Katsumi 1
  4 Fabrication of Microfluidic Bead Array Chip by Laser Induced Backside Wet Etching (LIBWE) AIST PRI *Tadatake Sato, Thomas Gumpenberger, Ryozo Kurosaki, Aiko Narazaki, Yoshizo Kawaguchi, Hiroyuki Niino
  5 Laser Chemistry of Biomaterials Hokkaido Univ. Tsuboi Yasuyuki 1
    Break 15:00〜15:15
  6 Femtosecond laser nanosurgery AIST 1, Osaka Univ. 2  *Wataru Watanabe 1, Sachihiro Matsunaga 2, Kiichi Fukui 2, and Kazuyoshi Itoh 2
  7 Development of orange fiber laser for ophthalmology Nidek Ken-ichi Hayashi
  8 Targeted gene transfer by the use of laser-induced stress wave Nat'l Defense Medical College 1, Keio Univ. 2 *Sato Shunichi 1, Terakawa Mitsuhiro 2, Obara Minoru 2
  9 New Protein Crystal Growth Technology by using Femto-second Laser irradiation and Solution Stirring Graduate School of Eng. 1, Sanken2, Osaka University, SOSHO Inc.3, CREST JST4 Mori Yusuke1
Symposium on Recent Progress in Nanoimprint Technology
August 29 (Tue.) 13:00〜16:45
29p-RC- / 0
  1 Trend of Research and Development in Nanoimptint Technology Univ. of Hyogo 1 Matsui Shinji 1
  2 Thermal nanoimprint Osaka Pref. Univ. Hirai Yoshihiko1
  3 UV-Nanoimprint AMRI-AIST *Hiroshima Hiroshi 1
  4 Roller nanoimprint process National Institute of Advanced Industrial Science and Technology (AIST) Hiroshi Goto
    Break 15:00〜15:15
  5 Photocurable resin for UV-nanoimprint lithography Toyo Gosei Co. LTD., Nobuji Sakai
  6 Fluoropolymers for Nanoimprint Lithography Asahi Glass Co., Ltd. 1 *Kawaguchi Yasuhide 1,Asakawa Akihiko 1,Sanada Yasuhiro 1
  7 Thermoplastic Polymers for Thermal Nanoimprint Lithography Soken Chemical & Engineering Co.,Ltd. 1 Mizawa Takahide 1
Bionanotechnology in the next generation
August 29 (Tue.) 13:30〜16:50
29p-ZS- / 0
  1 Introductory Talk AIST Naoki Matsuda 1
  2 Design and Construction of Molecular Interfaces Kyushu Inst. Tech. *HARUYAMA Tetsuya
  3 Synthesis and Application of Luminescent Quantum Dot Natl. Inst. Adv. Sci. Technol. On-Site Sens. Diag. Res. Lab. 1 *Ohba Hideki 1, Zhelev Zhivko 1, Bakalova Rumiana 1
  4 Nanoinjection technology toward post-genome science Tokyo Univ. Agricul. Technol. *Saito Mikako 1
    Break 15:10〜15:20
  5 Nanobiotechnology and Biosensor JAIST Tamiya Eiichi
  6 Thernoresponsive nano-biointerfaces for its biomedical applications Dept. Mater. Sci. & Technol., Tokyo Univ. of Sci. 1 *Akihiko Kikuchi 1
  7 Glyco-Biointerface JAIST 1 Yoshiko Miura 1
Organic-based Photoltaic Cells bearing Next Generation Energy
August 30 (Wed.) 10:00〜17:00
30a-ZS- / 0
  1 Dye Photovoltaic Cells as Cost-effective and Diffusible Solar Cells Osaka Univ. 1, Center for Advanced Sceinece and Innovation Yanagida Shozo 1,
  2  High efficiency of dye-sensitized solar cells Sharp Corporation, Solar systems development center ○Yasuo Chiba, Naoki Koide, Liyuan Han
  3 Solidification of dye sensitized solar cells Kyushu Inst. of Tech. Hayase Shuzi
  4 Dye-Sensitized Solar Cells Employing Electrodeposited Porous Crystalline Zinc Oxide Photoelectrode Gifu Univ. *Yoshida Tsukasa 1, Minoura Hideki 1
    Lunch 11:50〜13:00
30p-ZS- / 0
  1 Organic solid-state solar cells having p-i-n junction and nanostructure design Osaka Univ. *Hiramoto Masahiro 1
  2 Quasi-solid state dye-sensitized solar cells fabricated with gel-type polymeric solid electrolytes Nippon Oil Corp. 1 *Nishikitani Yoshinori 1, Kubo Takaya 1
  3 Polymer-Based Bulk Heterojunction Photovoltaic Cells Matsushita Electric Works, Ltd. Advanced Technologies Development Laboratory *Jun Sakai, Kenji Kawano, Norihiro Ito, Taisuke Nishimori
  4 Highly efficient organic thin-films solar cells AIST RCPV 1 Saito Kazuhiro 1, Yamanari Toshihiro 1, Taima Tetsuya 1
    Break 15:00〜15:15
  5 Synthetic Approach to Organic Solar-Cell Materials Tuned at Molecular Level ISIR Osaka Univ. 1, CREST/JST 2 *Yoshio Aso 1,2
  6 "Energy-storable Dye-sensitized Solar Cell" Accumulates Electricity by Photo-irradiation The Univ. of Tokyo, RCAST Segawa Hiroshi
  7 Application for Multi-Function Devices with Emission and Photodetection Operations Univ. Toyama 1 Matsushita Yousuke 1, Shimada Hiroyuki 1, Yanagi Junya 1, *Naka Shigeki 1, Okada Hiroyuki 1, Onnagawa Hiroyoshi 1
  8 Concluding Remarks AIST Research Center for Photovoltaics Kondo Michio
多元系機能材料研究会企画「多元系蛍光体の設計、作製、および応用 −新しい展開は何か−」
August 30 (Wed.) 13:00〜17:00
30p-H- / 0
  1 Introductory talk -Design, preparation and application of multinary compound phosphors- Res. Inst. of Electron., Shizuoka Univ. *Nakanishi Yoichiro
  2    
  3 Development of GaN related phosphors and their VFD application Mie Univ.1  Noritake Itron corp.2 *H. Miyake1, K. Nakao1, K. Hiramatsu1 , S. Kikuta2
  4 Electronic structures of phosphors -A theoretical approach- Kwansei Gakuin Univ. 1, NEC Lighting, Ltd. 2 Kazuyoshi Ogasawara 1, Hisashi Yoshida 1,2, Shinta Watanabe 1, Hiroaki Toyoshima 2
    Break 14:40〜14:55
  5 Local structure of luminescent center in multinary phosphor materials studied by XAFS analyses JASRI 1 Honma Tetsuo 1
  6 Luminescent properties of rare-earth-activated SrGa2S4 thin film phosphor formed by Laser annealing THE JAPAN STEEL WORKS, LTD. 1, Research Institute of Electronics, Shizuoka University 2 *Toshiaki Seino 1, Yuko Arai 1,Takashi Ebisawa 1, Yasumasa Kaneda 1, Takashi Harakawa 2, Hiroko Kiminami 2, Kazuhiko Hara 2, Yoichiro Nakanishi 2
  7 Synthesis of a red phosphor CaAlSiN3 doped with Eu2+, CASN, and its Application to White LEDs Mitsubishi Chemical 1 *Uheda Kyota 1
  8 Development Trend of Nitride-based Phosphors and Its Expansion to Eu-doped Sr-SiAlON Phosphor Toshiba Corp. R&D Center 1,Toshiba Research Consulting Corp. 2,Yokohama National Univ. 3  *Yumi Fukuda 1,Masaaki Tamatani 2,Ryosuke Hiramatsu 1,Hironori Asai 1,Jun-ichi Tatami 3,Katsutoshi Komeya 3,Toru Wakihara 3
  9 Closing Shizuoka Univ. Kazuhiko Hara
The present state and issues of teaching-materials development for applied physics education
August 30 (Wed.) 13:30〜16:30
30p-ZL- / 0
  1 Introductory talk Hokkaido Pharmaceutical Unov. 1, Tokyou Univ. Tech. 2, Nagano Nat'l. Coll. Tech 3 Nakano Yoshiaki 1, Kezuka Hiroshi 2, Nakazawa Tatsuo 3
  2 Developments of Apparatuses for Demonstration of Physical Phenomena by means of a Digital Balance
Kyoto Inst.Tech.1,Iwate Univ.2,Ritsumeikan Univ.3 Yoshio Saito1, Noriyuki Yoshimoto2,Chihiro Kaito3
  3 Experimental apparatus with a magnetic sensor
of a spring pendulum, a simple pendulum and a torsion pendulum
Maizuru National College of Technology 1,
Chubu.Univ.2 Maruyama Kaneyasu1,Okunura Koichi2,Okazaki Akihiko
  4 Development and demonstration of science experiment materials and teaching programs by undergraduates Chitose Inst. of Science and Technology 1 *Hasegawa Makoto 1, Ishida Koji 1
  5 Instruction for promoting self-education and communication ability Univ. Fukui 1 *Nobu Kuzuu
    Break 14:55〜15:10
  6 A Way to Introduce Advanced Science and Technology to High School Students Kyoto Sangyo Univ. 1 *Tsuboi Taiju 1
  7 Discussion  
Symposium on a decade of concentrated research of semiconducting silicides
August 30 (Wed.) 13:00〜17:05
30p-RD- / 0
  1 Introductory Talk - Topics in the last 10 years of Silicide Semiconductor Research - Shizuoka Univ. 1 *Tatsuoka Hirokazu 1
  2 A challenge to fabrication of \beta-FeSi2 substrates : Growth of bulk crystals Ibaraki N.C.T. *Hara Yoshiaki
  3 Heteroepitaxy of semiconducting silicides Univ. of Tsukuba Suemasu Takashi
  4 Low-temperature fabrication of beta-FeSi2 microdroplets by laser processing AIST 1 Narazaki Aiko 1, Sato Tadatake 1, Kawaguchi Yoshizo 1, Niino Hiroyuki 1
    14:50〜15:05
  5 Emerging research for Fe-Si silicides Okayama University of Science Kenichi Takarabe
  6 Epitaxial Growth of Ferromagnetic Silicide on IV Semiconductor Kyushu Univ. 1 *Sadoh Taizoh 1, Miyao Masanobu 1
  7 Perspective of silicides towards high index-contrast photonic crystals Kyoto Univ. 1 Maeda Yoshihito
  8 Discussion  
"Discussion of generic technologies to obtain new bulk single crystals, such as high efficient and low defects technologies succeeded from inorganic to organic crystals" organized by JSPS 161 committee
August 30 (Wed.) 13:00〜17:25
30p-ZT- / 0
  1 Introductory talk: Fundamental techniques to get new bulk single crystals NIMS 1,Osaka Univ. 2,Murata 3 *Kimura Hideo 1,Mori Yusuke 2,Fujii Takashi 3
  2 Advance in Si crystal growth technology and problems Shinshu Univ. *Taishi Toshinori 1, Hoshikawa Keigo 1
  3 Defect reduction by control of interface shape in growth technique for compound semiconductor bulk crystals Hitachi Cable, Ltd. *Shibata Masatomo 1
  4 Fundamental techniques of oxides for multipurpose applications: multi-elements and content control NIMS 1, *Kimura Hideo 1,
  5 Fruoride single crystals ; Growth of large crystals by CZ method Tokuyama corp. 1,IMRAM,Tohoku Univ. 2 *Teruhiko Nawata 1,Masada Isao 1, Mabuchi Toshirou 1,Fukuda Tsuguo 2
    Break 15:05〜15:20
  6 Semiconductor Materials for Power Electronics: Improvement of Macroscopic and Microscopic Qualities AIST 1 *NISHIZAWA Shin-ichi 1, KATO Tomohisa 1, ARAI Kazuo 1
  7 Single Crystal for Organic Electronics: Challenge of Crystal Growth & Handling Gakushuin Univ. Dept. Chemistry Kotani Masahiro
  8 Protein Crystal Growth: Challenges for obtaining high quality large crystals and the utilization of microgravity JAXA *Yoshizaki Izumi 1, Long Rong 1, Satoshi Adachi 1, Shinichi Yoda 1
  9 Process Control and Understanding of Crystal Growth: from inorganic to organic Graduate School of Eng., Osaka University1, SOSHO Inc.2, CREST JST3 Y. Mori1-3, Y. Takahashi1, S. Kawamura1, H. Adachi1-3, M. Yoshimura1, Y. Kitaoka & T. Sasaki1,3
The Milestone of bottom up epitaxial growth and the development toward nano-epitaxy
August 30 (Wed.) 9:00〜18:00
30a-B- / 0
  1 Introductory: The Milestone of bottom up epitaxial growth and the development toward nano-epitaxy Kobe Univ. Takashi Kita
  2 Advances in quantum wires, quantum dots, and related nanostructures Inst. of Industrial Science, Univ. of Tokyo *Sakaki Hiroyuki
  3 Fabrication of Semiconductor Nano Structures by Droplet Epitaxy National Inst. for Materials Science 1
 *Koguchi Nobuyuki 1
    Break 10:20〜10:35
  4 Growth of semiconductor nano-whiskers ASET 1, Hitachi CRL 2, Renesas 3, Tokyo Univ. 4 *Hiruma Kenji 1, Yazawa Masamitsu 2, Haraguchi Keiichi 3, Katsuyama Toshio 4
  5 Structural analysis of InP nanowires using x-ray scattering NTT Basic Research Labs. 1, Univ. Hyogo 2 *Kawamura Toimoaki 1, Fujikawa Seiji 2, Bhunia Satyaban 1, Watanabe Yoshio 1
  6 Atomic Ordering Formation in III-V Compound Epitaxial Layers NEC Corp. Fundamental and Environmental Res. Labs. 1, NEC Corp. System Device Res. Labs. 2 *Akiko Gomyo 1, Shunsuke Ohkouchi 1, Tohru Suzuki 2
  7 Growth and Characterization of Semiconductor Nanowires by Selective-Area MOVPE RCIQE Hokkaido Univ., Graduate School of IST Hokkaido Univ. Motohisa Junichi 1 2, Fukui Takashi 2 1
    Lunch 12:00〜13:00
30p-B- / 0
  1 MBE growth of self-assembled quantum wires and their application to LDs and VCSELs Ehime Univ. 1, Osaka Univ. 2, Tokushima Univ. 3, AIST 5, Nara Col. Tech. 4
 Shimomura Satoshi 1, Higuchi Yu 2, Sasahata Yoshifumi 2, Ohmori Kazuyuki 2, Toritsuka Tetsuro 2, Uenishi Atsushi 2, Kitada Takahiro 3, Ogura Mutsuo 4, Hiyamizu Satoshi 5
  2 Quantum wires and dots grown with an As2 source and their device applications AIST 1, CREST-JST 2, Shibaura Inst. Technol. 3 *Sugaya Takeyoshi 1,2, Amano Takeru 1,2, Komori Kazuhiro 1,2, Ogura Mutsuo 1, Yonei Kenji 3
  3 Fabrication of high density quantum dots using strain compensation (1)
- InAs/InGaAlAs multi-stacked structure grown on InP(311)B substrates -
National Institute of Information and Communications Technology 1,Doshisha Univ. 2 *Akahane Kouichi 1,Yamamoto Naokatsu 1,Gozu Shin-ichiro 1,Ueta Akio 1,Ohtani Naoki 2,Tsuchiya Masahiro 1
  4 Fabrication of high density quantum dots using strain compensation ~InAs /GaNAs quantum dots~ Univ. of Tsukuba, Inst. of Appl. Phys. 1 *Okada Yoshitaka 1, Shigekawa Hidemi 1, Oshima Ryuji 1
  5 Controlled Growth of InAs QDs on InP Substrate by Double-Capping Method and Its Growth Mechanism NIMS 1, Fujitsu Labs. 2, Nagoya Univ. 3 Sakuma Yoshiki 1, Takeguchi Masaki 1, Takemoto Kazuya 2, Hirose Shin-ichi 2, Usuki Tatsuya 2, Akanuma Yasuhiko 3, Yamakawa Ichiro 3, Nakamura Arao 3
  6 Controlling Shape of InAsSb Quantum Structures on Vicinal InP Substrates Grown by MOVPE Fujitsu 1, Fujitsu Labs 2 *Kawaguchi Kenichi 1,2, Ekawa Mitsuru 1,2, Akiyama Tomoyuki 1,2, Kuwatsuka Haruhiko 1,2, Sugawara Mitsuru 1,2
  7 Formation and Optical Characteristics of InAs Quantum Dots with Dilute N/Sb P&I Lab., Tokyo Tech Miyamoto Tomoyuki, Matsuura Tetsuya, Suzuki Ryoichiro
    Break 15:20〜15:35
  8 Self-formation control of high-density and high-uniformity InAs quantum dots Univ. Electro-Comm. *Koichi Yamaguchi
  9 MBE growth of InAs dots on patterned GaAs substrates using anodic porous alumina mask Tokyo Univ. of Agri. & Tech. *Morishita Yoshitaka 1, Maeda Kensaku 1, Umezawa Yusuke 1
  10 Effects of AlAs Coating for Stacked InAs/GaAs QDs Nippon Inst. of Tech. 1 Kanji Iizuka 1, Hiroshi Yokota 1, Hiroshi Okamoto 1
  11 Site-Control of InAs Quantum Dot Formation using the Nano-Jet Probe Method NEC Corp.1, Kumamoto Univ.2, Univ. of Tsukuba3  *Shunsuke Ohkouchi1, Yusui Nakamura2 , Kiyoshi Asakawa3
  12 in situ STM observation of InAs quantum dots during MBE growth Univ. Tokyo 1 Tsukamoto Shiro 1, Arakawa Yasuhiko 1
  13 Temporal evolution of strain and composition of InAs quantum dots during MBE growth JAEA 1 *Takahasi Masamitu 1
  14 First principles calculations and kinetic Monte Carlo simulations for the mechanism of quantum dot formation Tottori Univ. 1 Ishii Akira 1
  15 Summary: The Milestone of bottom up epitaxial growth and the development toward nano-epitaxy Kobe Univ. Takashi Kita
光とカオス −応用最前線−
August 30 (Wed.) 13:00〜17:30
30p-ZA- / 0
  1 Introductory Talk: Chaos and Optical Engineering Shizuoka Univ., Faculty Eng. Ohtsubo Junji
  2 Several Issues on Development of Chaotic Communications Systems ChaosWare 1 Umeno Ken 1
3 Dynamical Sensing and Communication Devices NTT-CS 1 * Peter Davis 1
  4 Cryptography using correlated randomness NTT Communication Science Labs. 1 Kazuyuki Yoshimura 1, Jun Muramatsu 1
  5 Implementation of correlated randomness cipher with chaotic lasers Takushoku Univ. 1 *Uchida Atsushi 1, Yoshimori Shigeru 1
    Break 15:45〜16:00
  6 Optical Chaotic Communication With Asynchronous Chaotic Laser Diode Transmitter/Receiver Array Waseda Univ. 1, HRC 2 *Satoshi Ebisawa 1, Haruka Miyazaki 1, Shinichi Komatsu 1,2
  7 Lateral Modes and Chaotic Instabilities in Broad-Area Laser Diodes Sony Corp.,CTDG 1 Yoshiro Takiguchi 1, Tsunenori Asatsuma 1, Sebastien Frederico 1, Akio Furukawa 1, Shoji Hirata 1
  8 Laser oscillation of wave chaos Department of Physics, Faculty of Science, Ritsumeikan University Kensuke S.Ikeda
  9 Lasing characteristics of 2D microstadium laser diodes Okayama Pref. Univ. 1, ATR Wave Engineering Labs. 2 *Fukushima Takehiro 1,2, Harayama Takahisa 2
The Upcoming Application for Cluster Ion Beam
August 30 (Wed.) 13:00〜17:15
30p-K- / 0
  1 Cluster ion beam processing -A review of physics, technology and applications- University of Hyogo, Laboratory of Advanced Science and Technology Isao Yamada
  2 High-Speed Processing with Gas Cluster Ion Beams Kyoto Univ. 1 *Toshio Seki 1, Jiro Matsuo 1
  3 GCIB Process Development for Electric and Industrial Appreciations Hakuto Co., Ltd. 1, Epion Corp. 2 * Kasuga Koji 1, J Weldon2, R MacCrimmon2, S Caliendo2, Y Shao2,
J Hautala2, B Zide2, M Gwinn2

  4 No damage surface processing using gas cluster ion beams LASTI, Univ. of Hyogo 1 *Noriaki Toyoda 1, Isao Yamada 1
  5 Prospect of Cluster Ion Beam Technology for Nano-Fabrication Kyoto Univ. *Matsuo Jiro 1
    Break 15:10〜15:25
  6 Cluster Doping Technology for Advanced CMOS Renesas technology Corp. Kuroi Takashi, Kawasaki Yoji, Ishibashi Masato, Yamashita Tomohiro
  7 Decaborane Ion Implantation Equipment Nissin Ion Equipment Co.,Ltd. 1, FUJITSU LABORATORIES LTD. 2, Matsuda Koji 1, Tanjyo Masayasu 1, Aoyama Takayuki 2,
  8 Simulation of Cluster Impacts for Novel Nano-processing Technology Dept. of Electric Sci. & Eng Kyoto Univ. 1, Quantum Sci. & Eng. Ctr. Kyoto Univ 2 *Takaaki Aoki 1, Jiro Matsuo 2
  9 Decaborane Ion Implantation for PMOSFETs FUJITSU LABORATORIS LTD 1, NISSIN Ion Equipment Co.,ltd. 2
 *Takayuki Aoyama1, Masatoshi Fukuda1,
Sei Umisedo2, Nariaki Hamamoto2, Tsutomu Nagayama2, Masayasu Tanjyo2
Future Prospects of Advanced Bio-Sensing
August 30 (Wed.) 13:00〜17:00
30p-RB- / 0
  1 Introductory Talk -- Significance of Bio-Sensing Yokohama National Univ. 1, CREST/JST 2 *Ogino Toshio 1,2
  2 Folding and quality control of intracellular proteins by molecular chaperones Kyoto Univ.,Inst.for Frontier Medical Sciences Kazuhiro Nagata
  3 Gravimetric measurements of Biomolecular Reactions by a quartz crystal microbalance Tokyo Institute of Technology Yoshio Okahata
  4 Molecular imaging of living yeast cells by linear and non-linear Raman microspectroscopy The Univ. of Tokyo, Dept. of Chem. Hiro-o Hamaguchi
    Break 14:50〜15:05
  5 Fabrication and Functionalization ofBio-intersurface Toray, New Frontiers Research Labs. Fumio Nakamura 1
  6 Bio-measurements using thermal lens spectroscopy and microchemical chip Nagoya Univ. *Tokeshi Manabu 1
  7 Nanoscopic Force Measurement and Bio-Interface Tokyo Inst. Tech. 1, RIKEN FRS 2 *Hara Masahiko 1,2
  8 Closing Talk - Future Prospects of Advanced Bio-Sensing RIEC, Tohoku University Michio Niwano
Materials science and interface physics of noble oxides covering SiO2 and High-k dielectrics
August 30 (Wed.) 13:00〜17:50
30p-ZW- / 0
  1 Introductory talk Waseda Univ1, Tsukuba Univ2, NIMS3 * Yamada Keisaku1, Yamabe Kikuo2, Chikyow Toyohiro3
  2 Effect of the SiO2/Si interface on enhanced Si and O self-diffusion in SiO2 NTT Basic Research Laboratories 1, Keio Univ. 2 Uematsu Masashi 1, Itoh Kohei 2
  3 Accelerated Oxidation at High-k/Si Interfaces due to Catalytic Effects of the Metal Oxide Dielectrics Osaka University, Graduate School of Engineering Watanabe Heiji, Takayoshi Shimura and Kiyoshi Yasutake
  4 Interfacial reaction in HfO2/SiO2/Si(001) observed by high-resolution RBS Kyoto Univ. 1, NTT-BRL 2, Selete 3, Waseda Univ. 4 Ming Zhao 1, *Kaoru Nakajima 1, Motofumi Suzuki 1, Kenji Kimura 1, Masashi Uematsu 2, Kazuyoshi Torii 3, Satoshi Kamiyama 3, Yasuo Nara 3, Keisaku Yamada 4
  5 Lanthanum Oxide for Gate Insulator Application IGSSE, Tokyo Inst. of Technol. 1
FCRC, Tokyo Inst. of Technol. 2 Kuniyuki Kakushima 1, Parhat Ahmet 2, Kazuo Tsutsui 1, Hiroshi Iwai 2
    Break 15:05〜15:20
  6 Physics of Metal/Insulator Interfaces -Structures and Electronic Properties- Chiba Univ. 1 *Nakayama Takashi 1,2
  7 Characterization of Chemical Structure at Metal Gate/Dielectric Interfaces and Evaluation of Effective Work Function of Metal Gate
Grad. School of AdSM, Hiroshima Univ. 1 Miyazaki Seiichi 1
  8 Interface Properties of Metal Electrodes and High-k Dielectric Films Using a Combinatorial Technique NIMS 1, Univ. of Tsukuba 2, Osaka Univ. 3, Selete 4, Waseda Univ. 5, NIST 6 NIMS1, Univ. of Tsukuba2, Osaka Univ.3, Selete4, NIST5, Waseda Univ.6
K. Ohmori Kenji 1, Ahmet Parhat 1, Shiraishi Kenji 2, Yoshitake Michiko 1, Yamabe Kikuo 2, Watanabe Heiji 3, Akasaka Yasushi 4, Nara Yasuo 4, K.-S. Chang 6, M. L. Green 6, Yamada Keisaku 5, Chikyow Toyohiro 1
  9 Mechanism for suppression of crystallization by Si-N bond formation in HfSiON Tsukuba Univ. 1, NIMS 2, Hiroshima Univ. 3, Selete 4, TEL 5, Univ. of Tokyo 6 Shiraishi Kenji 1, *Umezawa Naoto 2, Miyazaki Seiichi 3, Uedono Akira 1, Akasaka Yasushi 4,5, Inumiya Seiji 4, Momida Hiroyoshi 6, Ohno Takahisa 2, Ohmori Kenji 2, Chikyow Toyohiro 2
  10 Issues of High-k gate dielectrics clarified by mobility evaluation of High-k transistor RDC Toshiba Corp. 1,Semiconductor Company Toshiba Corp. 2 *Koyama Masato 1,Kamata Yoshiki 1,Koike Masahiro 1,Ino Tsunehiro 1,Tatsumura Kosuke 1,Nishiyama akira 1,Muraoka Kouichi 1,Ishihara Takamitsu 1,Iijima Ryosuke 1, Takayanagi Mariko 2
Emerging technologies and recent development of practical applications in spinelectronics
August 30 (Wed.) 13:00〜17:35
30p-ZK- / 0
  1 Introduction Tokyo Inst. Tech. 1, Matsushita Electric 2 Junji Yoshino 1, Hiroshi Sakakima 2
  2 Spintronics including nuclear spins NTT Basic Research Labs 1, SORST-JST 2, Tohoku Univ. 3 * Yoshiro Hirayama 1,2,3
  3 Photoinduced magnetism in ferromagnetic semiconductors ISEL, Tokyo Inst. of Tech.1 *Tsuyoshi Kondo 1,Hiro Munekata 1
  4 Giant Electric Field-Induced Magnetization Change in Multiferroic BaTiO3-LaMnO3 Ceramic Composites Nagoya Inst. of Tech. 1 Gomi Manabu 1
    Break 14:50〜15:05
  5 Simulation of Spin-Transfer-Driven Magnetization Reversal Advanced Research Lab. Hitachi, Ltd. 1 *Onogi Toshiyuki 1, Ichimura Masahiko 1
  6 Spin-Transfer Torque Writing Technology (STT-RAM) For Future MRAM Grandis 1 *Nagai Hideyasu 1,Huai Yiming 1
  7 Performance study of TMR heads with MgO barrier Data Storage & Thin Film Technology Components Business Group, TDK Corp. 1 *Takeo Kagami 1, Shunji Saruki 1,Satoshi Miura 1 and Tetsuya Kuwashima 1
  8 Near Field Optics and Heat Assisted Magnetic Recording Nihon Univ. 1 Katsuji Nakagawa 1
Recent Development in Neutron Detection Technique
August 30 (Wed.) 13:30〜17:50
30p-R- / 0
  1 Intoroductory Talk; Recent Development of Neutron Detection Technique JAEA 1 *Sakasai Kaoru 1,
  2 Current Status of the Development of Neutron Detectors for High Intense Pulsed Neutron Experiments JAEA Soyama Kazuhiko 1
  3 DARWIN: Dose Monitoring System Applicable to Various Radiations with Wide Energy Ranges JAEA 1 *Sato Tatsuhiko 1, Satoh Daiki 1, Endo Akira 1
  4 Development of phoswich-typed high energy neutron detector National Inst. of Radiological Sciences * Masashi Takada 1
    Break 15:35〜15:50
  5 Application of Personal Neutron Dosimeter to Higher Energy Region Kobe Univ. Keiji Oda
  6 Development of Fast Neutron Image Sensor Using Organic Liquid Scintillator and Wavelength Shifting Fiber Fuji Electric Systems. Co., Ltd. 1
Nagoya Univ. 2
JAEA 3
 Inui Daisuke 1, Watanabe Kenichi 2, Kawarabayashi Jun 2, Iguchi Tetsuo 2, Nishitani Takeo 3
  7 Neutron spatial distribution measurement with 6Li-containing TL sheet National Maritime Research Inst. 1, CSD 2, Nemoto & Co.,Ltd 3 *Konnai Akiko 1, Odano Naoteru 1, Sawamura Hidenori 2, Ozasa Naoto 3, Ishikawa Yuhzoh 3
Developments of Solar Cells - Present and Future -
August 31 (Thu.) 9:50〜17:25
31a-ZS- / 0
  1 Present status and futur of solar cells Gifu Univ. Engi. ERES Shuichi Nonomura
  2 Thin Film Si Photpvoltaic Solar Cell in MHI MHI Nagasakj R&D Ctr. 1, MHI Advanced Technol. R&D Ctr. 2, MHI Nagasaki Ship & Machinery Works 3 *Yoshiaki Takeuchi 1, Keisuke Kawamura 1, Tatsuyuki Nishimiya 1, Kengoh Yamaguchi 1, Youji Nakano 1, Nobuki Yamashita 1, Saneyuki Goya 2, Yasuhiro Yamauchi 3, Hiromu Takatsuka 3
  3 Development of Thin Film Si Solar Cells and Modules Kaneka corp. Akihiko Nakajima, Kenji Yamamoto
  4 Present Status and Future Prospects of Flexible Solar Cell using Plastic Film Substrate Fuji Electric Advanced Technology Co., Ltd Takehito Wada
  5 Future prospects of thin-film silicon solar cells Nat'l. Inst. Adv. Industr. Sci. Tech. 1 *Masuda Atsushi 1, Kondo Michio 1
    Lunch 12:00〜13:00
31p-ZS- / 0
  1 CIS-based Thin-film Solar Cells - From R&D to Production Showa Shell, CIS Project Team Katsumi Kushiya 1
  2 Development of thin film chalcogenide photovoltaic materials Ryukoku Univ. Takahiro Wada
  3 Development of dye-sensitized solar cells and their modules TOYOTA CRDL 1, TOYOTA TI 2, AISIN SEIKI 3 *Motohiro Tomoyoshi 1,2, Toyoda Tatsuo 3
  4 Small-molecular-type organic solid-state solar cells having p-i-n junction Osaka Univ. *Hiramoto Masahiro 1
    Break 15:00〜15:15
  5 Hierarchical Nanostructure for Organic Solar Cell Kyoto Univ. 1 Yoshikawa Susumu
  6 Current state of silicon solar cell and view in the future SHARP Corp. Solar Systems Development Center Kaneiwa minoru 1
  7 The Recent Trends of Crystalline Silicon Photovoltaic Industry RTS Corporation 1 Ohigashi Takashi 1, Ikki Osamu 1, Kaizuka Izumi 1, Kurihara Risa 1, Matsukawa Hiroshi 1
  8 Solar Photovoltaic Systems toward Large Scale Deployment Tokyo Univ. Agri. & Techn. 1 Kosuke Kurokawa 1
  9 Summary Tokyo Inst. Technology YAMADA Akira
π共役高分子の超階層制御と革新機能の探索
August 31 (Thu.) 13:00〜17:20
31p-ZH- / 0
  1 Introductory talk for advanced function in controlled hierarchal structures of pi-conjugate polymers LSSE, Kyushu Inst. Tech. Keiichi Kaneto
  2 Control of Super-Hierarchical Structures and Innovative Functions of Conducting Polymers Kyoto Univ. 1 *Akagi Kazuo 1
  3 Spin-Correlated Function of p-Conjugated Polymers Dept of Applied Chem., Waseda Univ. Hiroyuki Nishide
  4 Photochromic Molecular Switching on Conjugated Molecular Wires Nara Inst.Sci.Techn., NAIST Kawai Tsuyoshi, Nakashima Takuya
    Break 15:05〜15:20
  5 Organic field effect transistor using liquid as gate dielectric LSSE Kyushu Inst. of Tech., Linkoping Univ. Takashima Wataru 1, Mattias Andersson 2, Keiichi Kaneto 1, Olle Inganas 2
  6 Exploration for Innovative Function of Fluorescent Diphenylacetyene Polymers Kyungpook Univ.1, Nara Inst. of Sci. & Tech.2 *Kwak Giseop1, Fujiki Michiya2
  7 Electronic states of natural and metal doped DNA Tokyo Metropolitan Univ. Kenji Mizoguchi
Short-wavelength light-emitting devices with nitride-semiconductor
August 31 (Thu.) 13:40〜18:00
31p-E- / 0
  1 Introduction: GaN-based short wavelength light emitting devices SANYO Electric Co., Ltd. Kunisato Tatsuya
  2 Development of solid state ultraviolet light emitter Dept. MSE and 21st Century COE “Nano-factory”, Meijo Univ.1, Ibiden Co. Ltd.2, Showa Denko K.K.3 *H. Amano1, K. Balakrishnan1, M. Iwaya1, S. Kamiyama1, I. Akasaki1, T. Noro2, T. Takagi2, A. Bandoh3
  3 Luminescence characteristics of nonpolar (Al,In,Ga)N quantum structures and light emitting diodes NICP-ERATO JST 1, Univ. Tsukuba 2, UCSB 3, Tokyo Univ. Sci.4, Waseda Univ. 5 *Chichibu Shigefusa 1,2, Onuma Takeyoshi 1,2, Koyama Takahiro 1,2, Chakraborty Arpan 1,3, Masui Hisashi 1,3, Haskell Benjamin 1,3, Fini Paul 1,3, Keller Stacia 3, Kusakabe Kazuhide 4, Ohkawa Kazuhiro 1,4, DenBaars Steven 1,3, Speck James 1,3, Mishra Umesh, Sota Takayuki 5 and Nakamura Shuji 1,3
  4 Development of Ultraviolet (UV) Light-Emitting Diodes (LEDs) using Quaternary InAlGaN RIKEN 1 Hirayama Hideki 1
  5 Ultra-violet LEDs incorporating GaN quantum dots RIES, Hokkaido Univ. *Satoru Tanaka
    Break 15:45〜16:00
  6 Short-wavelength single-photon generation using nitride-based semiconductor quantum dots IIS 1, RCAST 2, Univ. of Tokyo *Satoshi. Kako 1, Munetaka Arita 1, and Yasuhiko Arakawa 1,2
  7 GaN nanocolumn based light emitting device Sophia Univ. 1, CREST JST 2 *Kishino Katsumi 1,2, Kikuchi Akihiko 1,2
  8 Blue-Violet Laser Diodes Nichia Corporation Nagahama Shinichi
  9 AlN deep-UV light-emitting diode with a wavelength of 210 nm NTT BRL *Taniyasu Yoshitaka 1, Kasu Makoto 1, Makimoto Toshiki 1
Optical Interconnection (II)
August 31 (Thu.) 13:00〜17:35
31p-ZT- / 0
  1 Introductory Talk: Towards Innovation of Optical Interconnection Kobe Univ. Wada Osamu
  2 Trends and Prospects of Optical Interconnection Technologies System Platforms Res. Labs., NEC Corporation Ichiro Ogura, Ichiro Hatakeyama, Junichi Sasaki, and Kazuhiko Kurata
  3 10-Gbit/s/channel Optical Transceiver for Optical Interconnection Hitachi Ltd. Central Research Lab. 1 *Masato Shishikura 1, Takuma Ban 1, Reiko Mita 1, Yasunobu Matsuoka 1
  4 Development of Optical Interconnection Technology for Consumer Electronics SONY Material Labs. Optoelectronics Lab. 1 Arakida Takahiro 1, Nakata Hidehiko 1, Naruse Terukazu 1, Okubo Miwa 1,
Koda Rintaro 1, Masui Yuji 1, Narui Hironobu 1
  5 Characteristics of 4 channel VCSEL array operating at 850 nm wavelength Fuji Xerox Co.,Ltd. Optical System Business Development 1 Takashi Kondo 1, Nobuaki Ueki 1, Jun Sakurai 1, Hideo Nakayama 1
    Break 15:20〜15:35
  6 Optical Interconnect for Computing Systems IBM Japan Tokyo Research Lab. 1 *Shigeru Nakagawa 1
  7 On-chip Optical Interconnection The Univ. of Tokyo Kazumi Wada, Yasuhiko Ishikawa
  8    
  9 Silicon photonic wire waveguides for on-chip optical interconnection. NTT MI labs. *Koji Yamada 1, Hiroshi Fukuda 1, Tai Tsuchizawa 1, Toshifumi Watanabe 1, Sei-ichi Itabashi 1
Recent advances in photoelectronics of fine particles and the related materials
August 31 (Thu.) 13:00〜17:05
31p-B- / 0
  1 Recent advances in photoelectronics using microspheres and the related materials: Introductory talk Kobe Univ. 1 Uchino Takashi 1
  2 Fabrication of Colloidal Photonic Crystals and Its Application to Biosensor Hokkaido University Misawa Hiroaki
  3 Application of Inorganic Nano-Phosphors for Biomedical Researches Tokyo Univ. of Sci. *SOGA Kohei
  4 Photoluminescence properties of Si nanocrystals and the photosensitization effect Faculty of Engineering, Kobe Univ. *Minoru Fujii, Shinji Hayashi
    Break 15:20〜15:35
  5 Microdisk and Microring Cavities of π-Conjugated Polymers Osaka Univ.1 *Fujii Akihiko1, Ozaki Masanori1
  6 Electronic excitation effects in nanometer-sized clusters Kobe Univ. 1 *Yasuda Hidehiro 1, Tanaka Akinori 1
The forefront of thermoelectric generation systems -Can thermoelectrics save the Eearth?-
August 31 (Thu.) 13:20〜17:50
31p-L- / 0
  1 Forefront of Development for Thermoelectric Power Generation Systems Shonan Inst. of Technology 1,Eng.Advancement Assoc. of Japan *Kajikawa Takenobu 1, Onishi Tetuo 2
  2 Development of Thermoelectric Conversion Module and System for Consumer Use Yamaha Co. 1 Horio Yuma 1, Hayashi Takahiro 1, Tachibana Takahisa 1, Kamimura Naoki 1
  3 Development of Thermoelectric Conversion System to recover exhaust heat below 150 degrees centigrade Toshiba Corp. Keiichi Sasaki 1, Takehisa hino 1, Yuujiro Nakatani 1, Kengo Wakamatsu 1, Takahiko Shindo 1, Yoshiyasu Ito 1
    Break 15:10〜15:25
  4 Development of thermoelectricity conversion systems using radiant heat for industrial furnaces Ishikawajima-Harima Heavy Industries Co.,Ltd  Toshinori Ota 1,Kouichi Fujita 1,Susumu Tokura 1,Kazuo Uematsu 1
  5 Thermo-Electro Technology as Automotive Heat-Recovery, Position & Prospect Sango Co. Ltd. R&D Dept. 1 *Hase Shuichi 1
  6 Development of oxide thermoelectric system for high temperature AIST 1, JST CREST 2 *Funahashi Ryoji 1,2, Urata Saori 2, Mihara Toshiyuki 1,2
  7 Summary Yamaguchi University Kengo Kishimoto
Process diagnostics technologies for process monitoring
August 31 (Thu.) 14:00〜18:05
31p-ZW- / 0
  1 13:30〜14:00 (Plasma Electronics Award)
  2 Process diagnostics technologies for process monitoring STDG, SBU, Sony corp. *Tatsumi Tetsuya 1
  3 Monitoring of Electron Density for plasma equipment for materials processing Chubu Univ. 1, Nagoya Univ. 2 *Nakamura Keiji 1, Sugai Hideo 2
  4 Monitoring of nano-particles in plasma CVD and its application to structure- and property-control of films Kyushu Univ. 1 *Masaharu Shiratani 1
  5 On-wafer Monitoring for High Performance Plasma Processes Tohoku Univ. 1, STARC2 *Seiji Samukawa 1, Hiroto Ohtake 1, Shingo Kadomura 2, Yoshinari Ichihashi, Akihito Nishitani 2 and Jun Hashimoto 2
  6 Optical plasma diagnostic techniques and in-situ plasma monitoring Nagoya Univ. *Kono Akihiro
    Break 15:50〜16:05
  7 Equipment & Plasma Monitoring Using rf Impedance Measurements Mitsubishi Elecric Corp. 1, Renesas Technology Corp. 2 *Taki Masakazu 1, Tuda Mutumi 1, Abe Yuji 1, Hanazaki Minoru 2, Komemura Toshio 2
  8 Improvement of Etching Process Uniformity using Radical Distribution Monitoring and Control Hitachi CRL *Tanaka Junichi 1, Kanno Seiichiro 1, Miya Go 1
  9 Defect control by in situ particle monitoring Tokyo Electron AT 1 *Tsuyoshi Moriya 1
  10 Plasma Sensing for Advanced Process Control Hitachi-Hitec Kasado Proc. 1 Enami Hiromichi 1
  11 Summary -Plasma nano-science established by monitoring and aim for the center for nano-manufacturing-
Nasoya Univ. 1 *Masaru Hori 1
193nm Immersion Lithography
September 1 (Fri.) 9:30〜14:00
1a-RC- / 0
  1 Current Status of ArF Immersion Lithography Renesas Technology Corp. *Hanawa Tetsuro, Takeo Ishibashi, Toshifumi Suganaga, Yoshiharu Ono, Kazuyuki Suko
  2 Current Status and Future Prospect of Immersion Exposure Tool Nikon Corp. 1 Hirotaka Kohno 1, Soichi Owa 1
  3 Development Status and Extendibility of ArF immersion Exposure Tools CANON INC. Optical Products Operations
CANON INC. Optical Technology Research Center
CANON INC. Optical Products Operations
CANON INC. Optical Products Operations Kobayashi Masamichi 1
Honda Tokuyuki 2
Nakano Hitoshi 3
Arakawa Mikio 4
  4 Immersion Lithography process issues for volume production Tokyo Electron Kyushu Ltd., Kitano Junichi, Kyoda Hideharu
    Lunch 11:30〜12:30
1p-RC- / 0
  1 Material Development Status for ArF Immersion Lithography Tokyo Ohka Kogyo, Advanced Material Development Div.1 *Katsumi Ohmori 1, Takeshi Iwai 1, Tomoyuki Ando 1, Kazuhito Sasaki 1, Hisanobu Harada 1
  2 ArF Immersion Lithography Materials Development Semiconductor Materials Research Lab. *Shimokawa Tsutomu 1,Yamaguchi Yoshikazu 1,Kusumoto Shirou 1, Shima Motoyuki 1,Takahashi Jun-ichi 1
  3 High refractive index fluid for next generation immersion lithography Mitsui Chemicals, Inc. 1 *Kagayama Akifumi 1, Nakano Takashi 1, Fukuda Shin 1