OYO BUTURI
Vol.86
No.2
2017
2
2017 2 86 2

OYO BUTURI Vol.86 No.2 (2017)

Power electronics, organic material device, biomass, and novel evaluation technology

Cover of OYO BUTURI Vol.86 No.2 (2017)
Cover photo of OYO BUTURI Vol.86 No.2 (2017)

Nanomechanical Membrane-type Surface stress Sensor (MSS). MSS electrically detects the stress induced by adsorption/desorption of target molecules. Its unique structure realized high sensitivity and compact sensor/system at the same time. Various materials including organic/inorganic/bio materials can be used for a receptor layer. MSS measurements can be performed in both liquid and gas environments. MSS is expected as an IoT olfactory sensor element. (p. 127)

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