High performance and functional polycrystalline-silicon thin-film transistors on a glass substrate
For devices constituting the IoT (Internet of Things), low-voltage and low-power-consumption transistors utilizing environmental power generation technology are desirable. In addition, it is important for them to have a low price. As one approach toward lowering prices, the author focused on glass substrates and tried to realize low-temperature polycrystalline-silicon (LTPS) thin-film transistors (TFTs) that operate at low voltages. We used a laser crystallization technique that facilitates thin silicon films with excellent crystalline quality. Through the fabrication of four-terminal LTPS TFTs, we succeeded in the operation of a CMOS inverter at Vdd=1.0 V.
- 1 Faculty of Engineering, Tohoku Gakuin University