OYO BUTURI
Vol.86
No.11
2017
11
2017118611962
OYO BUTURI Vol.86 No.11 (2017)
Our Research

High performance and functional polycrystalline-silicon thin-film transistors on a glass substrate

Akito HARA1

For devices constituting the IoT (Internet of Things), low-voltage and low-power-consumption transistors utilizing environmental power generation technology are desirable. In addition, it is important for them to have a low price. As one approach toward lowering prices, the author focused on glass substrates and tried to realize low-temperature polycrystalline-silicon (LTPS) thin-film transistors (TFTs) that operate at low voltages. We used a laser crystallization technique that facilitates thin silicon films with excellent crystalline quality. Through the fabrication of four-terminal LTPS TFTs, we succeeded in the operation of a CMOS inverter at Vdd=1.0 V.

  • 1 Faculty of Engineering, Tohoku Gakuin University
OYO BUTURI Vol.86 No.11 p.962 (2017)