Properties of impurities in semiconductors
Ken UCHIDA
|
Semiconductors are the base materials of the information technology era. In this paper, the fundamental concepts of semiconductors such as their bandstructures, effective mass, and Fermi energy level, will be introduced. Furthermore, doping of shallow impurities, which is a key technology in the fabrication of active electronic devices, will be explained.
|
|
Tokyo Institute of Technology, Department of Physical Electronics
Keywords：semiconductor, bandstructure, bandgap, impurity, shallow impurity, donor, acceptor, degenerate semiconductor, Fermi level, Bohr radius, hydrogen model
|
[full text PDF](494KB)