8 Plasma Electronics
 
March 17 (Wed.)
March 18 (Thu.)
March 19 (Fri.)
March 20 (Sat.)
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Invited Lecture           6号-ZG 13:00〜14:00    
8.1 Production and Control of Plasma     6号-ZB 9:30〜12:30 6号-ZB 13:30〜18:15        
8.2 Plasma Diagnostics 6号-ZC 9:30〜12:30 6号-ZC 13:30〜18:00            
8.3 Plasma Deposition and Surface Treatment         6号-ZB 9:30〜12:30 6号-ZB 14:00〜18:30 6号-ZB 9:00〜12:15  
8.4 Plasma Etching     6号-ZD 9:30〜12:30 6号-ZD 13:15〜18:00        
8.5 Plasma Nanotechnology         6号-R(Poster with short presentation) 10:10〜11:30 →Poster session
15:30〜17:30
   
8.6 General Plasma topics, New Application and Interdisciplinary Area         6号-ZG(Poster with short presentation) 9:30〜11:45 →Poster session
15:30〜17:30