13@Semiconductors A (Silicon)
 
March 17 (Wed.)
March 18 (Thu.)
March 19 (Fri.)
March 20 (Sat.)
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Review Lecture u¡Œã‚ÌLSI”zü‚É‚¨‚¯‚é‹à‘®Þ—¿‹Zpv           16†-D@13:30`17:15    
13.1 Fundamental Materials Characterization and Evaluation       16†-C@13:00`16:30 16†-C@9:00`12:00 16†-C@13:00`16:30    
13.2 Surface             16†-C@9:00`12:00 16†-C@13:00`14:45
13.3 Gate Insulator Technology       ‘̈ç-P9iPoster Session Onlyj@15:30`17:30 ‘̈ç-P11iPoster Session Onlyj@9:30`11:30 ‘̈ç-P13iPoster Session Onlyj@13:00`15:00 ‘̈ç-P16iPoster Session Onlyj@9:30`11:30  
13.4 Interconnect Technology         16†-D@10:00`12:30   16†-D@9:00`11:45  
13.5 Si Process Technology 16†-D@9:00`12:00 16†-D@13:00`17:00 16†-D@9:00`12:00 16†-D@13:00`18:30        
13.6 Si Devices/Integration Technology 16†-A@9:00`12:00 16†-B@13:00`17:15 16†-B@9:00`12:00 16†-B@13:15`17:30 16†-B@9:00`12:00      
13.7 Simulation     16†-C@9:30`12:00