13@Semiconductors A (Silicon)
 
March 30 (Mon.)
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Metal and metallization for advanced interconnect           2B-ZF@13:30`17:30    
13.1 Fundamental Materials Characterization and Evaluation         1‘Μ-P13iPoster session onlyj@9:30`11:30   1‘Μ-P17iPoster session onlyj@9:30`11:30  
13.2 Surface         3A-S@10:00`13:00 3A-S@14:00`18:00    
13.3 Gate Insulator Technology   3A-S@13:00`17:15 3A-S@9:45`13:00 3A-S@14:00`18:45 1C-ZT@9:15`12:30   1C-ZT@9:00`12:00 1C-ZT@13:00`15:00
13.4 Interconnect Technology     2B-ZG@9:30`12:30 2B-ZG@14:00`17:00 2B-ZF@9:15`12:30      
13.5 Si Process Technology 3L-T@9:00`12:00 3L-T@13:00`17:30 3L-T@9:00`12:00 3L-T@13:00`18:45 3L-T@9:00`12:15      
13.6 Si Devices/Integration Technology 3L-V@9:00`12:00 3L-V@13:00`17:30     3L-V@9:00`12:00 3L-V@13:00`17:30 3L-V@9:00`11:45 3L-V@12:45`14:15
13.7 Simulation     3L-V@9:00`12:45