13@Semiconductors A (Silicon)
 
Sept. 8 (Tue.)
Sept. 9 (Wed.)
Sept. 10 (Thu.)
Sept. 11 (Fri.)
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13.1 Fundamental Materials Characterization and Evaluation     Hw-TB@10:00`13:00 Hw-TB@14:00`17:30 Hw-TB@9:00`12:00      
13.2 Surface         ̈-P7iPoster session onlyj@9:30`11:30      
13.3 Gate Insulator Technology Hw-TA@9:30`12:30 Hw-TA@13:30`18:00     Hw-TE@9:15`12:00   Hw-TD@9:00`12:00 Hw-TD@13:00`14:30
            Hw-TE@9:00`12:00 Hw-TE@13:00`15:00
13.4 Interconnect Technology           Hw-TB@13:00`19:00    
13.5 Si Process Technology     Hw-TG@9:30`12:45 Hw-TG@13:45`19:00 Hw-TG@10:00`12:45 Hw-TG@13:45`18:35    
13.6 Si Devices/Integration Technology Hw-TE@9:00`12:00   Hw-TA@9:00`12:00   Hw-TA@9:00`12:00   Hw-TG@9:00`11:30 Hw-TG@12:30`14:00
            Hw-TH@9:00`12:00 Hw-TH@13:00`15:00
13.7 Simulation   Hw-TB@14:00`17:30