13@Semiconductors A (Silicon)
 
Mar. 27 (Thu.)
Mar. 28 (Fri.)
Mar. 29 (Sat.)
Mar. 30 (Sun.)
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13 Review Lectures and Geneal Sessions: Application-oriented BEOL Technology in ULSI Devices 10†-ZK@13:00`17:00
13.1 Fundamental Materials Characterization and Evaluation 11†-ZR@13:00`17:15 11†-ZR@9:30`12:30 11†-ZR@9:00`12:00 11†-ZR@13:00`14:15
13.2 Surface 11†-ZR@10:00`13:00 11†-ZR@14:00`17:30 11†-ZR@9:00`12:00
13.3 Gate Insulator Technology 10†-X@9:00`11:50 14†-H@9:00`12:00 14†-H@13:00`18:45 14†-H@9:00`12:00 14†-H@13:00`18:30 14†-H@9:00`12:00 14†-H@13:00`15:00
13.4 Interconnect Technology 10†-ZK@9:30`12:00 10†-ZK@10:00`12:30 10†-ZK@13:30`17:45
13.5 Si Process Technology 14†-G@9:00`12:00 14†-G@13:00`17:30 14†-G@9:00`12:00 14†-G@9:00`12:30 14†-G@13:30`18:15
13.6 Si Devices/Integration Technology ƒXƒ|-P2 (Poster session only) 9:30`11:30 ƒXƒ|-P5 (Poster session only) 9:30`11:30 ƒXƒ|-P11 (Poster session only) 9:30`11:30
13.7 Simulation 12†-NB@9:00`12:45