13@Semiconductors A (Silicon)
 
Sept. 2 (Tue.)
Sept. 3 (Wed.)
Sept. 4 (Thu.)
Sept. 5 (Fri.)
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13.1 Fundamental Materials Characterization and Evaluation 9†-G@9:15`12:00 9†-G@13:00`17:00 9†-G@9:15`12:00          
13.2 Surface   21†-CD@13:30`17:00 21†-CD@9:30`12:00 21†-CD@13:30`16:45        
13.3 Gate Insulator Technology 30†-Y@9:15`12:00   21†-CB@9:30`12:30 21†-CB@13:30`17:45 21†-CB@9:15`12:30 21†-CB@13:30`17:45    
13.4 Interconnect Technology         21†-CD@9:30`12:30 21†-CD@13:30`18:30    
13.5 Si Process Technology 22†-CH@9:00`11:45 22†-CH@12:45`18:15 22†-CH@9:30`12:30 22†-CH@13:30`18:30 22†-CH@9:00`11:30      
13.6 Si Devices/Integration Technology 9†-E@9:00`12:00 9†-E@13:00`17:00 9†-E@9:00`12:00   9†-E@9:00`12:00 9†-E@13:00`17:00 9†-E@9:00`11:00  
13.7 Simulation       ‘Μˆη-P11iPoster session onlyj@15:30`17:30