11@Semiconductors A (Silicon)
 
Mar. 27 (Tue.)
Mar. 28 (Wed.)
Mar. 29 (Thu.)
Mar. 30 (Fri.)
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11.1 Fundamental Materials Characterization and Evaluation F“-K@9:00`12:00 F“-K@13:00`18:00
11.2 Surface E“-ZG@9:30`11:30 F“-C@9:00`12:00 F“-C@13:00`16:45
11.3 Gate Insulator Technology E“-ZH@10:15`12:00 E“-ZH@9:00`12:30 E“-ZH@13:30`19:00 E“-ZH@9:15`12:30 E“-ZH@13:30`18:30 E“-ZH@9:00`12:00 E“-ZH@13:00`15:00
E“-ZK@9:30`12:15
11.4 Review Lectures and General Session:uLSI‘½‘w”zό‚ΙŠΦ‚·‚ιƒvƒƒZƒXEM—Š«ƒƒJƒjƒYƒ€‚ƍŐζ’[‹Zpv E“-ZL@10:00`12:10 E“-ZL@13:10`16:15
11.4 Interconnect Technology ƒA-P5iPoster session onlyj@9:30`11:30 ƒA-P9iPoster session onlyj@9:30`11:30
11.5 Si Process Technology D“-SM@9:30`12:30 D“-SM@13:30`18:45 D“-SM@9:00`13:00 D“-SM@14:00`18:45 D“-SM@9:00`13:00 D“-SM@14:00`15:00
11.6 Si Devices/Integration Technology D“-SC@10:00`13:00 D“-SC@14:00`18:00 E“-ZQ@9:30`12:00 E“-ZQ@9:30`12:30 E“-ZQ@13:30`17:45 D“-SC@10:00`12:45
11.7 Simulation F“-G@9:30`12:15 F“-G@13:45`16:00