11 Semiconductors A (Silicon)
 
Sept. 4 (Tue.)
Sept. 5 (Wed.)
Sept. 6 (Thu.)
Sept. 7 (Fri.)
Sept. 8 (Sat.)
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11Review Lectures and Geneal Sessions: Which Technologies will Achieve a breakthrough for Future ULSI Interconnect 2†-ZQ@10:00`12:10 2†-ZQ@13:15`17:00
11.1 Fundamental Materials Characterization and Evaluation G-ZF@9:30`12:30 G-ZF@13:30`18:00
11.2 Surface G-ZF@9:30`12:15 G-ZF@13:15`17:50 G-ZF@9:00`12:15
11.3 Gate Insulator Technology 2†-ZM@9:45`13:00 2†-ZM@14:00`17:00 2†-ZQ@9:30`12:00 2†-ZM@10:15`13:00 2†-ZM@14:00`18:30 2†-ZM@9:30`12:45 2†-ZM@14:00`18:00 2†-ZM@9:15`12:30
11.4 Interconnect Technology G-B@10:00`12:00 G-B@13:00`18:00 G-B@9:00`12:00
11.5 Si Process Technology ‘̈ç-P2 (poster session only)@9:30`11:30 ‘̈ç-P6 (poster session only)@9:30`11:30 ‘̈ç-P10 (poster session only)@9:30`11:30
11.6 Si Devices/Integration Technology G-ZE@13:30`17:30 G-ZE@9:15`12:00 2†-ZL@10:00`13:00 2†-ZL@14:00`19:00 2†-ZL@9:00`12:00 2†-ZL@13:00`15:00
11.7 Simulation G-ZE@9:45`12:30 G-ZE@14:00`17:00