11 Semiconductors A (Silicon)
 
Mar. 22 (Wed.)
Mar. 23 (Thu.)
Mar. 24 (Fri.)
Mar. 25 (Sat.)
Mar. 26 (Sun.)
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11.1 Fundamental Materials Characterization and Evaluation 7-V 9:30`12:30 7-V 13:30`17:00 7-V 9:30`12:30              
11.2 Surface             14-P7 (poster session only) 9:30`11:30   14-P10 (poster session only) 9:30`11:30  
11.3 Gate Insulator Technology       7-V 13:30`19:00 7-V 9:30`12:30 7-V 13:30`18:45 7-V 9:30`12:30 7-V 13:30`19:00 7-V 9:30`12:30  
11.4 Review Lectures and General Session: What's going on in Cu/Low-k technologies     8-C 10:00`12:05 8-C 13:00`17:45            
11.4 Interconnect Technology         8-J 10:00`13:00 8-J 14:00`18:30 8-J 9:00`13:00      
11.5 Si Process Technology 7-W 9:30`12:30 7-W 13:30`17:15 7-W 9:30`12:30 7-W 13:30`18:00 7-W 9:00`12:30 7-W 13:30`17:45        
11.6 Si Devices/Integration Technology     7-X 9:30`12:30   7-X 9:30`12:30 7-X 13:30`18:45 7-X 9:30`12:30 7-X 13:30`19:00 7-X 9:00`12:00 7-X 13:00`15:00
11.7 Simulation       7-X 13:30`17:30