1 Radiation·Plasma Electronics
 
Mar. 22 (Wed.)
Mar. 23 (Thu.)
Mar. 24 (Fri.)
Mar. 25 (Sat.)
Mar. 26 (Sun.)
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1.1 Radiation·Accelerator·Nuclear Reactor         7-M 9:30`12:30 7-M 13:30`18:30        
1.2 Plasma Sources and Production Technologies 7-ZC 9:30`12:30 7-ZC 13:30`17:15 7-ZC 9:30`12:30 7-ZC 13:30`17:45            
1.3 Diagnostics of Reactive Plasmas         7-ZC 9:30`12:30   7-W 9:00`12:30      
1.4 Plasma-Based Material Processing 7-M (poster with short presentation) 9:00`11:50                  
1.5 Nano-Technologies by Plasma Process                 7-ZC 9:15`12:00 7-ZC 13:00`14:45
1.6 General Topics of Plasma Discharges             7-ZC 9:30`12:30 7-ZC 13:30`16:30    

1.7 Review Lectures and General Session: Plasma etch, Frontier and Breakthrough Strategy

5-ZL 9:45`12:30 5-ZL 13:30`16:45                
1.7 Plasma Etching     7-ZA 9:30`12:00 7-ZA 13:00`16:15