11@Semiconductors A (Silicon)
 
Aug. 29 (Tue.)
Aug. 30 (Wed.)
Aug. 31 (Thu.)
Sept. 1 (Fri.)
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11.1 Fundamental Materials Characterization and Evaluation           ƒR-ZN@13:00`18:00    
11.2 Surface ƒR-ZN@10:00`13:00 ƒR-ZN@14:00`16:30            
11.3 Gate Insulator Technology     P5(poster session only) @9:30`11:30   P10(poster session only) @9:30`11:30 P12(poster session only) @13:00`15:00    
11.4 Review Lectures and General Session:Historical review on LSI multi-level interconnect technology and the on-going evolution toward nanometers-scaling ƒR-ZW@10:00`12:10 ƒR-ZW@13:10`16:45            
11.4 Interconnect Technology     ƒR-ZN@10:00`13:00 ƒR-ZN@14:00`19:00 ƒR-ZN@9:00`12:00      
11.5 Si Process Technology ƒR-ZQ@10:00`13:00 ƒR-ZQ@14:00`17:30 ƒR-ZQ@10:00`13:00 ƒR-ZQ@14:00`19:00 ƒR-ZQ@10:00`12:45 ƒR-ZQ@14:00`18:45    
11.6 Si Devices/Integration Technology ƒR-ZR@10:00`13:00 ƒR-ZR@14:00`16:30 ƒR-ZR@10:00`13:00 ƒR-ZR@14:00`17:15 ƒR-ZR@10:00`13:00      
11.7 Simulation           ƒR-ZR@14:00`18:30